The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Oct. 31, 2017

Filed:

Nov. 04, 2016
Applicants:

Sumitomo Electric Industries, Ltd., Osaka-shi, JP;

Tohoku University, Sendai-shi, JP;

Inventors:

Fuminori Mitsuhashi, Itami, JP;

Takashi Ishizuka, Itami, JP;

Masaki Ueno, Itami, JP;

Yoshihiro Tsukuda, Yokohama, JP;

Yasunori Tateno, Yokohama, JP;

Maki Suemitsu, Sendai, JP;

Hirokazu Fukidome, Sendai, JP;

Hiroyuki Nagasawa, Sendai, JP;

Assignees:

Sumitomo Electric Industries, Ltd., Osaka-shi, JP;

Tohoku University, Sendai-shi, JP;

Attorneys:
Primary Examiner:
Int. Cl.
CPC ...
H01L 29/16 (2006.01); H01L 29/06 (2006.01); H01L 29/786 (2006.01); H01L 21/02 (2006.01); H01L 21/04 (2006.01); H01L 29/66 (2006.01);
U.S. Cl.
CPC ...
H01L 29/1606 (2013.01); H01L 21/02378 (2013.01); H01L 21/02527 (2013.01); H01L 21/043 (2013.01); H01L 21/044 (2013.01); H01L 29/0657 (2013.01); H01L 29/66045 (2013.01); H01L 29/78684 (2013.01);
Abstract

A laminated body includes: a substrate portion composed of silicon carbide; and a graphene film disposed on a first main surface of the substrate portion, the graphene film having an atomic arrangement oriented with respect to an atomic arrangement of the silicon carbide of the substrate portion. A region in which a value of G'/G in Raman spectrometry is not less than 1.2 is not less than 10% in an area ratio in an exposed surface of the graphene film, the exposed surface being a main surface of the graphene film opposite to the substrate portion.


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