The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Oct. 31, 2017

Filed:

Sep. 20, 2016
Applicant:

Applied Materials Israel Ltd., Rehovot, IL;

Inventors:

Efim Vinnitsky, Ashkelon, IL;

Samuel Ives Nackash, Nes Ziona, IL;

Shmuel Barak Mizrahi, Nes Ziona, IL;

Natan Schlimoff, Rehovot, IL;

Assignee:
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01J 37/147 (2006.01); H01J 37/20 (2006.01); G03F 1/00 (2012.01); H01J 37/28 (2006.01);
U.S. Cl.
CPC ...
H01J 37/147 (2013.01); H01J 37/28 (2013.01);
Abstract

A mirror support module having a body that includes an internal portion surrounding an inner space, an external portion, an aperture formed in the body and an intermediate region that extends between a segment of the internal portion and the aperture. When the intermediate region is subjected to a force directed in a first direction, the intermediate region can be moved in the first direction towards the aperture to reduce an area of the aperture while the external portion remains stable regardless of movement of the intermediate region.


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