The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Oct. 31, 2017

Filed:

May. 15, 2015
Applicant:

Headway Technologies, Inc., Milpitas, CA (US);

Inventors:

Shengyuan Wang, San Jose, CA (US);

Kunliang Zhang, Fremont, CA (US);

Min Li, Fremont, CA (US);

Assignee:

Headway Technologies, Inc., Milpitas, CA (US);

Attorneys:
Primary Examiner:
Int. Cl.
CPC ...
G11B 5/127 (2006.01); C23C 14/35 (2006.01); G11B 5/187 (2006.01); G11B 5/39 (2006.01); G11B 5/31 (2006.01); C23C 14/02 (2006.01); C23C 14/16 (2006.01);
U.S. Cl.
CPC ...
G11B 5/1278 (2013.01); C23C 14/024 (2013.01); C23C 14/16 (2013.01); C23C 14/35 (2013.01); C23C 14/351 (2013.01); C23C 14/358 (2013.01); G11B 5/1877 (2013.01); G11B 5/3116 (2013.01); G11B 5/3163 (2013.01); G11B 5/3903 (2013.01); Y10T 29/49034 (2015.01); Y10T 29/49043 (2015.01); Y10T 428/1171 (2015.01);
Abstract

A method of forming a sub-structure, suitable for use as a hot seed in a perpendicular magnetic recording head, is described. A buffer layer of alumina with a thickness of 50-350 Angstroms is formed by atomic layer deposition as a write gap. Thereafter, one or more seed layers having a body-centered cubic (bcc) crystal structure may be deposited on the buffer layer. Finally, a magnetic film made of FeCo or FeNi with a coercivity of 60-110 Oe is deposited on the seed layer(s) by a physical vapor deposition (PVD) method at a rate of 0.48 to 3.6 Angstroms per second. The magnetic film is preferably annealed at 220° C. for 2 hours in a 250 Oe applied magnetic field.


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