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The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Patent No.:

US 9804101 B1

PDFFull Text
Date of Patent:
Oct. 31, 2017

Filed:

Jun. 09, 2014

System and method for reducing the bandwidth of a laser and an inspection system and method using a laser

Applicant:

Kla-tencor Corporation, Milpitas, CA (US);

Inventors:

Yujun Deng, San Jose, CA (US);

Yung-Ho Chuang, Cupertino, CA (US);

John Fielden, Los Altos, CA (US);

Assignee:

KLA-Tencor Corporation, Milpitas, CA (US);

Attorney:

Bever, Hoffman & Harms, LLP

Primary Examiner:

Kenneth J Malkowski

Int. Cl.
CPC ...
G01J 1/42 (2006.01); G01N 21/95 (2006.01); H01S 3/094 (2006.01); G01N 21/88 (2006.01); G02F 1/39 (2006.01); H01S 3/00 (2006.01); G02F 1/35 (2006.01);
U.S. Cl.
CPC ...
G01N 21/9501 (2013.01); G01N 21/8806 (2013.01); G02F 1/39 (2013.01); H01S 3/094015 (2013.01); G02F 1/3534 (2013.01); H01S 3/0078 (2013.01); H01S 3/0092 (2013.01);
Abstract

A DUV laser includes an optical bandwidth filtering device, such as etalon, which is disposed outside of the laser oscillator cavity of the fundamental laser, and which directs one range of wavelengths into one portion of a frequency conversion chain and another range of wavelengths into another portion of the frequency conversion train, thereby reducing the bandwidth of the DUV laser output while maintaining high conversion efficiency in the frequency conversion chain.

Find Patent Forward Citations

Deng, Yujun. (2017). System and method for reducing the bandwidth of a laser and an inspection system and method using a laser (U.S. Patent No. 9804101). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/9804101

Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile

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