The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 31, 2017
Filed:
Apr. 16, 2015
Entegris, Inc, Billerica, MA (US);
Minna Hovinen, Edina, MN (US);
John R. Kingery, Eden Prairie, MN (US);
Glenn M. Tom, Bloomington, MN (US);
Kevin T. O'Dougherty, Arden Hills, MN (US);
Kirk Mikkelsen, Chanhassen, MN (US);
Donald D. Ware, Woodbury, MN (US);
Peter C. Van Buskirk, Newton, CT (US);
ENTEGRIS, INC., Billerica, MA (US);
Abstract
Fluid supply systems for storage and dispensing of chemical reagents and compositions, e.g., high purity liquid reagents and chemical mechanical polishing compositions used to manufacture microelectronic device products, having capability for detection of an empty or near-empty condition when the contained liquid is at or approaching depletion during dispensing operation. Fluid delivery systems employing empty detect arrangements are described, including pressure transducer monitoring of dispensed material intermediate the supply package and a servo-hydraulic dispense pump, or monitoring of dispenser chamber replenishment times in a dispenser being replenished on a cyclic schedule to flow material from the dispenser to a downstream tool utilizing the dispensed material.