The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 24, 2017
Filed:
Jul. 13, 2015
Applicant:
Canon Kabushiki Kaisha, Tokyo, JP;
Inventors:
Assignee:
CANON KABUSHIKI KAISHA, Tokyo, JP;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01B 13/00 (2006.01); B23P 15/00 (2006.01); C23F 1/00 (2006.01); C03C 25/00 (2006.01); B44C 1/22 (2006.01); H01L 21/302 (2006.01); H01L 21/461 (2006.01); H01L 21/306 (2006.01); H01L 21/768 (2006.01); H01L 21/311 (2006.01); H01L 21/02 (2006.01); H01L 21/288 (2006.01); H01L 21/56 (2006.01); H01L 21/67 (2006.01); C09K 13/10 (2006.01);
U.S. Cl.
CPC ...
H01L 21/30608 (2013.01); C09K 13/10 (2013.01); H01L 21/02063 (2013.01); H01L 21/288 (2013.01); H01L 21/31116 (2013.01); H01L 21/568 (2013.01); H01L 21/67126 (2013.01); H01L 21/76805 (2013.01); H01L 21/76816 (2013.01);
Abstract
An etching method includes etching a silicon substrate with a liquid composition containing an alkaline organic compound, water, and a boron compound with a content in the range of 1% by mass to 14% by mass. The boron compound is at least one of boron sesquioxide, sodium tetraborate, metaboric acid, sodium perborate, sodium borohydride, zinc borate, and ammonium borate.