The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 24, 2017
Filed:
Mar. 31, 2015
Applicant:
Fei Company, Hillsboro, OR (US);
Inventors:
Assignee:
FEI Company, Hillsboro, OR (US);
Primary Examiner:
Int. Cl.
CPC ...
A61N 5/00 (2006.01); H01J 37/32 (2006.01); H01J 37/18 (2006.01); H01J 37/305 (2006.01); H01J 37/317 (2006.01); H01J 37/30 (2006.01);
U.S. Cl.
CPC ...
H01J 37/32 (2013.01); H01J 37/18 (2013.01); H01J 37/3002 (2013.01); H01J 37/3056 (2013.01); H01J 37/3178 (2013.01); H01J 2237/002 (2013.01); H01J 2237/006 (2013.01); H01J 2237/022 (2013.01); H01J 2237/2003 (2013.01); H01J 2237/24445 (2013.01); H01J 2237/30472 (2013.01); H01J 2237/317 (2013.01);
Abstract
A cold trap is provided to reduce contamination gases that react with the beam during operations that use a process gas. The cold trap is set to a temperature that condenses the contamination gas but does not condense the process gas. Cold traps may be used in the sample chamber and in the gas line.