The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 24, 2017
Filed:
Feb. 26, 2014
Asml Netherlands B.v., Veldhoven, NL;
Raymond Wilhelmus Louis LaFarre, Helmond, NL;
Satish Achanta, Leuven, BE;
Matteo Filippi, Eindhoven, NL;
Yogesh Karade, Eindhoven, NL;
Antonius Johannes Maria Nellissen, Horst, NL;
Ronald Van Der Wilk, Knegsel, NL;
Hendrikus Christoffel Maria Van Doremalen, Nuenen, NL;
Wilhelmus Jacobus Johannes Welters, Veldhoven, NL;
ASML NETHERLANDS B.V., Veldhoven, NL;
Abstract
A method of manufacturing an object holder for use in a lithographic apparatus, the object holder including one or more electrically functional components, the method including: using a composite structure including a carrier sheet different from a main body of the object holder and a layered structure including one or a plurality of layers and formed on the carrier sheet; connecting the composite structure to a surface of the main body such that the layered structure is between the carrier sheet and the surface of the main body; and removing the carrier sheet from the composite structure, leaving the layered structure connected to the main body.