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The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Patent No.:

US 9797038 B1

PDFFull Text
Date of Patent:
Oct. 24, 2017

Filed:

Mar. 26, 2013

Organic material deposition apparatus, and organic material deposition method using same

Applicant:

Sunic System, Ltd., Gyeonggi-do, KR;

Inventors:

Chang Sik Choi, Gyeonggi-do, KR;

Young Im, Seoul, KR;

Young Jong Lee, Gyeonggi-do, KR;

Seong Ho Kim, Gyeonggi-do, KR;

Sun Hyuk Kim, Seoul, KR;

Jung Gyun Lee, Gyeonggi-do, KR;

In Ho Hwang, Gyeonggi-do, KR;

Assignee:

SUNIC SYSTEMS, LTD., Gyeonggi-Do, KR;

Attorney:

Sughrue Mion, PLLC

Primary Examiner:

Caleb Henry

Assistant Examiner:

Mounir Amer

Int. Cl.
CPC ...
C23C 14/12 (2006.01); C23C 14/24 (2006.01); C23C 14/50 (2006.01); H01L 51/56 (2006.01); C23C 14/56 (2006.01); H01L 51/00 (2006.01);
U.S. Cl.
CPC ...
C23C 14/12 (2013.01); C23C 14/24 (2013.01); C23C 14/50 (2013.01); C23C 14/56 (2013.01); H01L 51/001 (2013.01); H01L 51/0002 (2013.01); H01L 51/0011 (2013.01); H01L 51/56 (2013.01);
Abstract

An apparatus for depositing an organic material includes: a main chamber; a first substrate loading section in which a first substrate is loaded in the first radial direction and seated; a second substrate loading section in which a second substrate is loaded in the second radial direction and seated; a scanner including a linear organic material deposition source, a source moving means to which the organic material deposition source is coupled to linearly move the organic material deposition source so that the organic material particles are injected onto the surface of the first substrate or the second substrate, and a rotating means for rotating the source moving means; and a scanner moving means for moving the scanner back and forth so that the scanner is positioned in the first deposition region or the second deposition region.

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