The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Oct. 17, 2017

Filed:

Dec. 08, 2014
Applicant:

AZ Electronic Materials (Luxembourg) S.a.r.l., Luxembourg, LU;

Inventors:

Toshiya Okamura, Kakegawa, JP;

Takashi Kanda, Kakegawa, JP;

Issei Sakurai, Kakegawa, JP;

Bertram Bernd Barnickel, Kakegawa, JP;

Hiroyuki Aoki, Kakegawa, JP;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
C01B 21/087 (2006.01); H01L 21/02 (2006.01); C08G 77/62 (2006.01); C09D 1/00 (2006.01);
U.S. Cl.
CPC ...
H01L 21/02222 (2013.01); C01B 21/087 (2013.01); C08G 77/62 (2013.01); C09D 1/00 (2013.01); H01L 21/02164 (2013.01); H01L 21/02282 (2013.01);
Abstract

[Problem] To provide a perhydropolysilazane making it possible to form a siliceous film with minimal defects, and a curing composition comprising the perhydropolysilazane. [Means for Solution] The present invention provides a perhydropolysilazane having a weight-average molecular weight of 5,000 to 17,000, characterized in that whenH-NMR of a 17% by weight solution of said perhydropolysilazane dissolved in xylol is measured, the ratio of the amount of SiHbased on the aromatic ring hydrogen content of the xylol is 0.235 or less and the ratio of the amount of NH based on the aromatic ring hydrogen content of the xylol is 0.055 or less, and a curing composition comprising the perhydropolysilazane. The present invention also provides a method for forming a siliceous film, comprising coating the curing composition on a substrate and heating.


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