The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 17, 2017
Filed:
Sep. 19, 2013
Applicant:
Carl Zeiss Smt Gmbh, Oberkochen, DE;
Inventors:
Severin Waldis, Bern, CH;
Sebastian Lani, Courtman, CH;
Benedikt Knauf, Aalen, DE;
Jian Deng, Biel, CH;
Roger Marc Bostock, Muensingen, CH;
Assignee:
Carl Zeiss SMT GmbH, Oberkochen, DE;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G02B 26/08 (2006.01); G02B 7/18 (2006.01); G03F 7/20 (2006.01);
U.S. Cl.
CPC ...
G02B 26/0816 (2013.01); G02B 7/1815 (2013.01); G02B 26/0833 (2013.01); G03F 7/702 (2013.01); G03F 7/70075 (2013.01); G03F 7/70116 (2013.01); G03F 7/70825 (2013.01); Y10T 29/49117 (2015.01);
Abstract
A mirror array having a total surface extending perpendicularly to a surface normal, comprises a multiplicity of mirror elements each having a reflection surface and at least one degree of freedom of displacement, wherein the totality of the mirror elements form a parqueting of a total reflection surface of the mirror array, and wherein the mirror array is embodied modularly as a tile element in such a way that the parqueting of the total reflection surface can be extended by a tiling of a plurality of such mirror arrays.