High-resolution scanning microscopy

Abstract

In a microscope for high resolution scanning microscopy of a sample, said microscope comprising—an illumination device for illuminating the sample, —an imaging device for scanning at least one point spot or line spot across the sample and for imaging the point spot or line spot into a diffraction-limited, stationary single image with magnification into a detection plane, —a detector device for detecting the single image in the detection plane for different scanning positions with a spatial resolution, which, taking into consideration the magnification, is at least twice as high as a full width at half maximum of the diffraction-limited single image, —an evaluation device for evaluating a diffraction pattern of the single image for the scanning positions from data of the detector device and for generating an image of the sample, said image having a resolution that is increased beyond the diffraction limit, provision is made for—the detector device to have a detector array, which has pixels and is larger than the single image, and—a non-imaging redistribution element, which is disposed upstream of the detector array and distributes the radiation from the detection plane in a non-imaging manner among the pixels of the detector array.