The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Oct. 17, 2017

Filed:

Aug. 18, 2014
Applicant:

Disco Corporation, Tokyo, JP;

Inventor:

Yusaku Ito, Tokyo, JP;

Assignee:

DISCO CORPORATION, Tokyo, JP;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G01B 9/02 (2006.01); G01N 27/82 (2006.01); H04N 13/02 (2006.01); G01B 11/06 (2006.01); H01L 21/67 (2006.01); H01L 21/68 (2006.01);
U.S. Cl.
CPC ...
G01N 27/82 (2013.01); G01B 11/0608 (2013.01); H01L 21/67092 (2013.01); H01L 21/681 (2013.01); H04N 13/0203 (2013.01);
Abstract

A processing apparatus including a chuck table for holding a workpiece, a processing unit for processing the workpiece held on the chuck table, and a feeding mechanism for relatively moving the chuck table and the processing unit in an X direction as a feeding direction. The processing apparatus further includes a three-dimensional imaging mechanism for imaging the workpiece held on the chuck table in three dimensions composed of the X direction, a Y direction perpendicular to the X direction, and a Z direction perpendicular to both the X direction and the Y direction and then outputting an image signal obtained above, a control unit for generating a three-dimensional image according to the image signal output from the three-dimensional imaging mechanism, and an output unit for outputting the three-dimensional image generated by the control unit.


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