The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 17, 2017
Filed:
Nov. 09, 2012
Tokyo Electron Limited, Tokyo, JP;
Yasuharu Sasaki, Miyagi, JP;
Kazuyoshi Matsuzaki, Ibaraki, JP;
Tokyo Electron Limited, Tokyo, JP;
Abstract
A temperature control apparatus () includes a heat exchanger () configured to exchange heat with the surroundings using a phase change of a refrigerant, a rotary pump () configured to receive the refrigerant from the heat exchanger () and fuse the refrigerant with oil contained inside the rotary pump, and an oil water separator () configured to receive the refrigerant fused with the oil from the rotary pump () and separate the refrigerant from the oil. The temperature control apparatus further includes a refrigeration cycle that implements a cooling function by circulating the refrigerant separated from the oil back to the heat exchanger ().