The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 17, 2017
Filed:
May. 03, 2013
Applicant:
Korea Research Institute of Chemical Technology, Daejeon, KR;
Inventors:
Bo-Keum Park, Gangwon-do, KR;
Taek-Mo Chung, Daejeon, KR;
Chang-Gyoun Kim, Daejeon, KR;
Sheby Mary George, Daejeon, KR;
Young-Kuk Lee, Daejeon, KR;
Jong-Sun Lim, Daejeon, KR;
Seog-Jong Jeong, Daejeon, KR;
Dong-Ju Jeon, Daejeon, KR;
Ki-Seok An, Daejeon, KR;
Sun-Sook Lee, Daejeon, KR;
Assignee:
KOREA RESEARCH INSTITUTE OF CHEMICAL TECHNOLOGY, Daejeon, KR;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
C07F 3/00 (2006.01); C23C 16/40 (2006.01); C23C 16/18 (2006.01); C23C 16/44 (2006.01); C23C 16/455 (2006.01);
U.S. Cl.
CPC ...
C07F 3/003 (2013.01); C07F 3/00 (2013.01); C23C 16/18 (2013.01); C23C 16/409 (2013.01); C23C 16/44 (2013.01); C23C 16/45525 (2013.01);
Abstract
Disclosed herein is a novel strontium precursor containing a beta-diketonate compound. Being superior in thermal stability and volatility, the strontium precursor can form a quality strontium thin film.