The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 10, 2017
Filed:
May. 07, 2013
Asml Netherlands B.v., Veldhoven, NL;
Thibault Simon Mathieu Laurent, Eindhoven, NL;
Johannes Henricus Wilhelmus Jacobs, Heeze, NL;
Wilhelmus Franciscus Johannes Simons, Beesel, NL;
Martijn Houben, 's-Hertogenbosch, NL;
Raymond Wilhelmus Louis Lafarre, Helmond, NL;
Koen Steffens, Veldhoven, NL;
Han Henricus Aldegonda Lempens, Weert, NL;
Rogier Hendrikus Magdalena Cortie, Ittervoort, NL;
Ruud Hendrikus Martinus Johannes Bloks, Helmond, NL;
Gerben Pieterse, Eindhoven, NL;
Siegfried Alexander Tromp, Papendrecht, NL;
Theodorus Wilhelmus Polet, Grave, NL;
Jim Vincent Overkamp, Eindhoven, NL;
Van Vuong Vy, Eindhoven, NL;
ASML NETHERLANDS B.V., Veldhoven, NL;
Abstract
An object table to support an object, the object table having a support body, an object holder to hold an object, an opening adjacent an edge of the object holder, and a channel in fluid communication with the opening via a passageway, wherein the channel is defined by a first material which is different to a second material defining the passageway.