The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 10, 2017
Filed:
Sep. 10, 2014
Applicant:
H.c. Starck, Inc., Newton, MA (US);
Inventors:
Steven A. Miller, Canton, MA (US);
Prabhat Kumar, Framingham, MA (US);
Richard Wu, North Chelmsford, MA (US);
Shuwei Sun, Framingham, MA (US);
Stefan Zimmermann, Bad Saeckingen, DE;
Olaf Schmidt-Park, Needham, MA (US);
Assignees:
H.C. Starck Inc., Newton, MA (US);
H.C. Starck GmbH, Goslar, DE;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
C23C 14/34 (2006.01); H01J 37/34 (2006.01); B22F 1/00 (2006.01); C22C 1/04 (2006.01); C23C 24/04 (2006.01); C23C 14/00 (2006.01); C23C 14/14 (2006.01); C23C 4/134 (2016.01);
U.S. Cl.
CPC ...
C23C 14/3414 (2013.01); B22F 1/0014 (2013.01); C22C 1/045 (2013.01); C23C 4/134 (2016.01); C23C 14/0057 (2013.01); C23C 14/14 (2013.01); C23C 24/04 (2013.01); H01J 37/3426 (2013.01); H01J 2237/332 (2013.01);
Abstract
In various embodiments, a sputtering target initially formed by ingot metallurgy or powder metallurgy and rejuvenated by, e.g., cold spray, is utilized in sputtering processes to produce metallic thin films.