The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 10, 2017
Filed:
Jan. 29, 2015
Masarykova Univerzita, Brno, CZ;
Tescan Orsay Holding, A.s., Brno, CZ;
Pavel Stahel, Javornik, CZ;
Mirko Cernak, Bratislava, SK;
Zdenek Navratil, Brno, CZ;
Jaroslav Jiruse, Blansko, CZ;
Jiri Fiala, Blansko, CZ;
Martin Hanicinec, Uherske Hradiste, CZ;
MASARYKOVA UNIVERZITA, , CZ;
TESCAN ORSAY HOLDING, A.S., , CZ;
Abstract
A method for reducing or removing organic and/or inorganic contamination from a vacuum system of imaging and analytical devices, wherein at least a portion of the area of the inner surface of the vacuum space of the vacuum system is provided with a photocatalytic layer, at least a portion of this photocatalytic layer being cooled to a temperature in the range of 0 K to 280 K, whereby the photocatalytic layer is afterwards at least partially irradiated by electromagnetic radiation, which activates a photocatalytic reaction of the photocatalytic layer with the adsorbed gases of the atmosphere of the inner vacuum space of the vacuum system, where this reaction decomposes the contaminants, reducing their concentration and/or the concentration of water in the inner vacuum space of the vacuum system.