The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 03, 2017
Filed:
Feb. 02, 2016
Applicant:
Jeol Ltd., Tokyo, JP;
Inventor:
Yuji Kohno, Tokyo, JP;
Assignee:
JEOL Ltd., Tokyo, JP;
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01H 37/28 (2006.01); H01J 37/22 (2006.01); H01J 37/28 (2006.01); H01J 37/153 (2006.01);
U.S. Cl.
CPC ...
H01J 37/222 (2013.01); H01J 37/153 (2013.01); H01J 37/28 (2013.01); H01J 2237/0453 (2013.01); H01J 2237/1534 (2013.01); H01J 2237/221 (2013.01); H01J 2237/24455 (2013.01); H01J 2237/24465 (2013.01); H01J 2237/2802 (2013.01);
Abstract
An electron microscope capable of measuring aberrations accurately is provided. The microscope is adapted to obtain scanning transmission electron (STEM) images by detecting electrons transmitted through a sample (S). The microscope () includes a segmented detector () having a detection surface () for detecting the electrons transmitted through the sample (S). The detection surface () is divided into detector segments (D-D) for detecting the electrons transmitted through the sample (S). The microscope () further includes an aperture plate () for limiting the active areas of the detector segments (D-D) on which the electrons impinge.