The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 03, 2017
Filed:
Nov. 06, 2012
Nikon Corporation, Tokyo, JP;
Michel Pharand, Los Gatos, CA (US);
Chetan Mahadeswaraswamy, San Francisco, CA (US);
Michael B. Binnard, Belmont, CA (US);
Nikon Corporation, , JP;
Abstract
A stage assembly () that includes (i) a stage () that retains a device (); (ii) a reaction assembly () that is spaced apart from the stage (); (iii) a stage mover () that moves the stage (), the stage mover () including a magnet array () that is coupled to the stage () and a conductor array () that is coupled to the reaction assembly (); (iv) a temperature adjuster (); and (v) a control system () that selectively controls the temperature adjuster (). The conductor array () includes a set of first zone conductor units (), and a set of second zone conductor units (). The temperature adjuster () independently adjusts the temperature of the set of first zone conductor units (), and the set of second zone conductor units ().