The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 03, 2017
Filed:
Nov. 04, 2014
Asml Netherlands B.v., Veldhoven, NL;
Sander Catharina Reinier Derks, Veldhoven, NL;
Eric Willem Felix Casimiri, Veldhoven, NL;
Marcel Mathijs Theodore Dierichs, Veldhoven, NL;
Sumant Sukdew Ramanujan Oemrawsingh, Veldhoven, NL;
Wilhelmus Theodorus Anthonius Johannes Van Den Einden, Veldhoven, NL;
Johannes Fransiscus Maria Velthuis, Veldhoven, NL;
Alexander Nikolov Zdravkov, Veldhoven, NL;
Wassim Zein Eddine, Veldhoven, NL;
ASML Netherlands B.V., Veldhoven, NL;
Abstract
An apparatus comprising at least one sealing aperture () comprising a hollow part (), having an inner surface (), extending at an interface between different zones () of the apparatus; and a member () positioned in the hollow part configured to substantially transmit EUV radiation and to substantially filter non-EUV radiation at the interface; wherein the inner surface of the hollow part has a surface treatment configured to increase absorption of the non-EUV radiation that is transferred by the member to the hollow part.