The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 03, 2017
Filed:
Nov. 13, 2014
Tokyo Ohka Kogyo Co., Ltd., Kawasaki-shi, JP;
Masatoshi Arai, Kawasaki, JP;
Yoshiyuki Utsumi, Kawasaki, JP;
TOKYO OHKA KOGYO CO., LTD., Kawasaki-Shi, JP;
Abstract
A resist composition which generates acid upon exposure and exhibits changed solubility in a developing solution under action of acid, and which includes a base component (A) which exhibits changed solubility in a developing solution under action of acid, the base component (A) including a polymeric compound (A1) having a structural unit (a0) represented by general formula (a0-0) shown below (wherein Vrepresents an aliphatic cyclic group with or without a substituent; Rrepresents a lactam-containing cyclic group or a sultam-containing cyclic group; Yrepresents an oxygen atom (—O—), an ester bond (—C(═O)—O—) or a single bond; and Wrepresents a group formed by a polymerization reaction of a polymerizable group-containing group).