The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 03, 2017
Filed:
Jul. 03, 2014
Ulvac, Inc., Chigasaki-shi, JP;
Yixin Yang, Chigasaki, JP;
Yoshiyuki Mitsuhashi, Fujisawa, JP;
Masayuki Iijima, Chigasaki, JP;
Sadatsugu Wakamatsu, Chigasaki, JP;
Kazuhiko Saito, Chigasaki, JP;
Tomoharu Fujii, Chigasaki, JP;
Tsuyoshi Yoshimoto, Chigasaki, JP;
Togo Hosoya, Chigasaki, JP;
Takayoshi Hirono, Chigasaki, JP;
Nobuhiro Hayashi, Chigasaki, JP;
Nobuaki Kakutani, Chigasaki, JP;
Naoki Sunagawa, Chigasaki, JP;
Isao Tada, Chigasaki, JP;
Hiroyuki Hirano, Chigasaki, JP;
ULVAC, INC., Chigasaki-shi, JP;
Abstract
Provided is a film-forming apparatus capable of cleaning a discharge apparatus under a state in which a film-forming space and a cleaning gas ambience are separated from each other while continuing to form a film on an object to be film-formed having a film-like shape. The film-forming apparatus includes a cleaning chamber configured to be connected to a film-forming space when a shutter is opened, and to be separated from the film-forming space and cause a cleaning gas to be discharged into an internal space when the shutter is closed; means for moving a discharge apparatus between a cleaning position inside the cleaning chamber and a film-forming position closer to a cylindrical member than the cleaning position; and a control apparatus that controls the discharge apparatus to discharge the raw material gas when the discharge apparatus is moved to the film-forming position, and controls the shutter to be closed so as to fill the cleaning chamber with the cleaning gas when the discharge apparatus is moved to the cleaning position.