The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 03, 2017
Filed:
Dec. 30, 2015
Applicant:
American Air Liquide, Inc., Fremont, CA (US);
Inventors:
Glenn Kuchenbeiser, Newark, DE (US);
Bastien Lefevre, Wilmington, DE (US);
Assignee:
American Air Liquide, Inc., Fremont, CA (US);
Attorneys:
Primary Examiner:
Int. Cl.
CPC ...
C23C 16/455 (2006.01); C23C 16/34 (2006.01); C23C 16/56 (2006.01); H01L 21/02 (2006.01); C01B 21/068 (2006.01); H01L 21/311 (2006.01);
U.S. Cl.
CPC ...
C23C 16/45553 (2013.01); C01B 21/068 (2013.01); C23C 16/345 (2013.01); C23C 16/45536 (2013.01); C23C 16/56 (2013.01); H01L 21/0217 (2013.01); H01L 21/0228 (2013.01); H01L 21/02211 (2013.01); H01L 21/02219 (2013.01); H01L 21/02271 (2013.01); H01L 21/02274 (2013.01); H01L 21/31111 (2013.01);
Abstract
Disclosed are amino(iodo)silane precursors, methods of synthesizing the same, and methods of using the same to deposit silicon-containing films using vapor deposition processes. The disclosed amino(iodo)silane precursors include SiHI(N(iPr)) or SiHI(N(iBu)).
Kuchenbeiser, Glenn. (2017). Amino(iodo)silane precursors for ald/cvd silicon-containing film applications and methods of using the same (U.S. Patent No. 9777373). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/9777373
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile