The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Sep. 26, 2017

Filed:

Jun. 29, 2012
Applicants:

Satoru Sano, Ube, JP;

Yoshihiro Nishimura, Ube, JP;

Takayuki Watanabe, Ube, JP;

Yuuzou Katou, Ube, JP;

Akira Ueki, Ube, JP;

Shinzo Mitomi, Fukuoka, JP;

Masanobu Takasu, Fukuoka, JP;

Yusuke Hara, Fukuoka, JP;

Takaaki Tanaka, Fukuoka, JP;

Inventors:

Satoru Sano, Ube, JP;

Yoshihiro Nishimura, Ube, JP;

Takayuki Watanabe, Ube, JP;

Yuuzou Katou, Ube, JP;

Akira Ueki, Ube, JP;

Shinzo Mitomi, Fukuoka, JP;

Masanobu Takasu, Fukuoka, JP;

Yusuke Hara, Fukuoka, JP;

Takaaki Tanaka, Fukuoka, JP;

Assignees:
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01J 37/34 (2006.01); C23C 14/34 (2006.01); C04B 35/053 (2006.01); C04B 35/56 (2006.01); C04B 35/58 (2006.01); C04B 35/626 (2006.01); C04B 35/645 (2006.01); G11B 5/851 (2006.01); C23C 14/08 (2006.01);
U.S. Cl.
CPC ...
H01J 37/3429 (2013.01); C04B 35/053 (2013.01); C04B 35/5607 (2013.01); C04B 35/5611 (2013.01); C04B 35/5626 (2013.01); C04B 35/58014 (2013.01); C04B 35/6261 (2013.01); C04B 35/645 (2013.01); C23C 14/3407 (2013.01); C23C 14/3414 (2013.01); G11B 5/851 (2013.01); H01J 37/3426 (2013.01); C04B 2235/3206 (2013.01); C04B 2235/3839 (2013.01); C04B 2235/3843 (2013.01); C04B 2235/3847 (2013.01); C04B 2235/3886 (2013.01); C04B 2235/5445 (2013.01); C04B 2235/761 (2013.01); C04B 2235/762 (2013.01); C04B 2235/77 (2013.01); C23C 14/081 (2013.01); H01J 37/34 (2013.01);
Abstract

Disclosed is an MgO target for sputtering, which can accelerate a film formation rate even when MgO is used as a target for sputtering in the formation of an MgO film. The MgO target for sputtering, which includes MgO and an electroconductive material as main components, and in which the electroconductive material is capable of imparting orientation to a MgO film when the MgO film containing the electroconductive material is formed by a DC sputtering.


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