The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 26, 2017
Filed:
Mar. 12, 2015
Applicant:
Tokyo Electron Limited, Tokyo, JP;
Inventors:
Yuichi Takenaga, Iwate, JP;
Takanori Saito, Iwate, JP;
Assignee:
Tokyo Electron Limited, Tokyo, JP;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G05B 19/418 (2006.01); H01L 21/67 (2006.01);
U.S. Cl.
CPC ...
G05B 19/41865 (2013.01); G05B 2219/45032 (2013.01); H01L 21/67253 (2013.01); Y02P 90/04 (2015.11); Y02P 90/20 (2015.11);
Abstract
A control apparatus is configured to control an operation of a substrate processing apparatus configured to place at least a monitor substrate therein. The control apparatus controls the operation of the substrate processing apparatus based on a difference between a processing result of the monitor substrate processed by the substrate processing apparatus and a predictive result so as to optimize the monitor substrate loading frequency.