The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 26, 2017
Filed:
Aug. 15, 2014
Samsung Electronics Co., Ltd., Suwon-Si, Gyeonggi-Do, KR;
Byung-Bok Kang, Yongin-si, KR;
Seok-Min Kang, Hwaseong-si, KR;
Bon-Ok Koo, Hwaseong-si, KR;
Kyoung-Hwan Kim, Yongin-si, KR;
Myung-Woo Kim, Yongin-si, KR;
In-Gi Kim, Hwaseong-si, KR;
Hyun-Chul Kim, Seoul, KR;
Sung-Ki Roh, Hwaseong-si, KR;
Gyung-Jin Min, Seongnam-si, KR;
Eun-Seok Lee, Hwaseong-si, KR;
Jin-Suk Hong, Hwaseong-si, KR;
Samsung Electronics Co., Ltd., Gyeonggi-do, KR;
Abstract
In a method of inspecting a surface of a substrate, a first surface image of the substrate before loaded into a process chamber may be obtained. The first surface image may be processed to detect a defect on the surface of the substrate. Thus, the surfaces of all of the substrate may be inspected during a process may be performed without transferring the substrates.