The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Sep. 26, 2017

Filed:

Jul. 13, 2016
Applicant:

Hitachi-lg Data Storage, Inc., Tokyo, JP;

Inventors:

Kentaro Osawa, Tokyo, JP;

Hiroyuki Minemura, Tokyo, JP;

Yumiko Anzai, Tokyo, JP;

Assignee:
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G01B 9/02 (2006.01);
U.S. Cl.
CPC ...
G01B 9/02091 (2013.01);
Abstract

Provided is an optical measuring device that can realize a wide measurement region without an increase in the measurement time or a reduction in the measurement region while avoiding damage to a measurement target due to excessive light exposure, using a simple configuration. The device includes a light source, an optical splitting unit configured to split a light beam emitted from the light source into a signal beam and a reference beam, an objective lens configured to focus the signal beam and irradiate a measurement target with the signal beam, a scanning unit configured to move the focus position of the signal beam, an optical element having lower transmissivity in its peripheral portion than in its central portion, interference optics configured to combine the reference beam with the signal beam reflected or scattered by the measurement target, thereby generating interference beams, and photodetectors configured to detect the respective interference beams.


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