The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 26, 2017
Filed:
Jul. 23, 2013
Applicant:
Ev Group Gmbh, St. Florian am Inn, AT;
Inventors:
Friedrich Paul Lindner, Scharding, AT;
Peter Oliver Hangweier, Pram, AT;
Assignee:
EV Group GmbH, St. Florian am Inn, AT;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 21/02 (2006.01); B65G 47/00 (2006.01); H01L 21/67 (2006.01);
U.S. Cl.
CPC ...
B65G 47/00 (2013.01); H01L 21/02002 (2013.01); H01L 21/67173 (2013.01); H01L 21/67201 (2013.01); Y10T 156/10 (2015.01);
Abstract
The invention relates to a device for processing of substrates, especially wafers, with at least one pretreatment module, at least one aftertreatment module and at least one primary treatment module, and the pretreatment module and the aftertreatment module can be switched as a lock for the primary treatment module, and a corresponding method for processing of substrates, especially wafers.