The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 19, 2017
Filed:
Dec. 18, 2013
Applied Materials, Inc., Santa Clara, CA (US);
Anzhong Chang, San Jose, CA (US);
Paul Brillhart, Pleasanton, CA (US);
Surajit Kumar, Sunnyvale, CA (US);
Satheesh Kuppurao, San Jose, CA (US);
Mehmet Tugrul Samir, Mountain View, CA (US);
David K. Carlson, San Jose, CA (US);
Steve Aboagye, San Jose, CA (US);
Anh N. Nguyen, Milpitas, CA (US);
Kailash Kiran Patalay, Santa Clara, CA (US);
Joseph M. Ranish, San Jose, CA (US);
Oleg Serebryanov, San Jose, CA (US);
Dongming Iu, Union City, CA (US);
Shu-Kwan Lau, Sunnyvale, CA (US);
Zuoming Zhu, Sunnyvale, CA (US);
Herman Diniz, Fremont, CA (US);
APPLIED MATERIALS, INC., Santa Clara, CA (US);
Abstract
Embodiments of the present disclosure relate to a dome assembly. The dome assembly includes an upper dome including a central window, and an upper peripheral flange engaging the central window at a circumference of the central window, wherein a tangent line on an inside surface of the central window that passes through an intersection of the central window and the upper peripheral flange is at an angle of about 8° to about 16° with respect to a planar upper surface of the peripheral flange, a lower dome comprising a lower peripheral flange and a bottom connecting the lower peripheral flange with a central opening, wherein a tangent line on an outside surface of the bottom that passes through an intersection of the bottom and the lower peripheral flange is at an angle of about 8° to about 16° with respect to a planar bottom surface of the lower peripheral flange.