The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Sep. 19, 2017

Filed:

Aug. 31, 2015
Applicant:

Carl Zeiss Smt Gmbh, Oberkochen, DE;

Inventors:

Ulrich Weber, Ulm, DE;

Stefan Hembacher, Bobingen, DE;

Armin Schoeppach, Aalen, DE;

Assignee:

Carl Zeiss SMT GmbH, Oberkochen, DE;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G03F 7/20 (2006.01); H02N 1/00 (2006.01); H02N 2/02 (2006.01); F16H 21/44 (2006.01);
U.S. Cl.
CPC ...
G03F 7/70141 (2013.01); F16H 21/44 (2013.01); G03F 7/70258 (2013.01); G03F 7/70825 (2013.01); H02N 1/002 (2013.01); H02N 2/023 (2013.01); Y10T 74/18992 (2015.01);
Abstract

An actuator includes a housing, a movable part, and an advancing unit that is at least temporarily connected to the movable part. The advancing unit includes a deformation unit and a deformer configured to deform the deformation unit with a vector component perpendicular to an effective direction of the actuator so that a total length of the deformation unit changes in the effective direction of the actuator as a result of the deformation. The movable part is configured to move in the effective direction of the actuator upon a removal of the vector component on the deformation unit and the deformation unit is disposed along the effective direction of the actuator upon the removal of the vector component on the deformation unit.


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