The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 19, 2017
Filed:
Feb. 12, 2015
Applicant:
Carl Zeiss Smt Gmbh, Oberkochen, DE;
Inventor:
Yim-Bun Patrick Kwan, Aalen, DE;
Assignee:
Carl Zeiss SMT GmbH, Oberkochen, DE;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G03F 7/20 (2006.01); G02B 7/02 (2006.01); G02B 7/00 (2006.01);
U.S. Cl.
CPC ...
G03F 7/70141 (2013.01); G02B 7/003 (2013.01); G02B 7/028 (2013.01); G03F 7/70816 (2013.01); G03F 7/70833 (2013.01); G03F 7/70975 (2013.01);
Abstract
The disclosure pertains to an optical apparatus, in particular for microlithography, that includes an optical module, a support structure and a connection apparatus. The connection apparatus includes at least one connection unit which includes a first connector part and a second connector part. The first connector part is connected to the optical module, and the second connector part is connected to the support structure.