The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 19, 2017
Filed:
May. 05, 2016
Murata Manufacturing Co., Ltd., Nagaokakyo-shi, Kyoto, JP;
Antti Iihola, Helsinki, FI;
Altti Torkkeli, Tuusula, FI;
Ville-Pekka Rytkönen, Klaukkala, FI;
Matti Liukku, Helsinki, FI;
MURATA MANUFACTURING CO., LTD., Nagaokakyo-Shi, Kyoto, JP;
Abstract
The present invention relates to a micromechanical device comprising a multi-layer micromechanical structure including only homogenous silicon material. The device layer comprises at least a rotor and at least two stators. At least some of the rotor and at least two stators are at least partially recessed to at least two different depths of recession from a first surface of the device layer and at least some of the rotor and at least two stators are at least partially recessed to at least two different depths of recession from a second surface of the device layer.