The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 12, 2017
Filed:
Apr. 29, 2015
Applicant:
Toyota Jidosha Kabushiki Kaisha, Toyota, JP;
Inventor:
Nobuhira Abe, Miyoshi, JP;
Assignee:
TOYOTA JIDOSHA KABUSHIKI KAISHA, Toyota-shi, JP;
Primary Examiner:
Int. Cl.
CPC ...
H01L 21/673 (2006.01); H01L 21/67 (2006.01);
U.S. Cl.
CPC ...
H01L 21/6719 (2013.01); H01L 21/67353 (2013.01); H01L 21/67373 (2013.01); H01L 21/67376 (2013.01);
Abstract
A wafer carrierincludes a lower uniton which a semiconductor waferis placed, and an upper unitdetachably attached to the lower unit, and forming a sealed chamberfor housing the semiconductor waferbetween the upper unitand the lower unit. The upper unitis provided with plural lock mechanismsthat fix the lower unitto the upper unitby abutting on a side surface of the lower unit