The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Sep. 12, 2017

Filed:

Dec. 12, 2014
Applicant:

Cree, Inc., Durham, NC (US);

Inventors:

Zoltan Ring, Chapel Hill, NC (US);

Sei-Hyung Ryu, Cary, NC (US);

Daniel Namishia, Wake Forest, NC (US);

Assignee:

Cree, Inc., Durham, NC (US);

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 21/02 (2006.01); H01L 23/00 (2006.01); C23C 16/02 (2006.01); C23C 16/34 (2006.01); C23C 16/509 (2006.01);
U.S. Cl.
CPC ...
H01L 21/0217 (2013.01); C23C 16/0245 (2013.01); C23C 16/345 (2013.01); C23C 16/509 (2013.01); H01L 21/022 (2013.01); H01L 21/0214 (2013.01); H01L 21/02211 (2013.01); H01L 21/02274 (2013.01); H01L 23/564 (2013.01); H01L 2924/0002 (2013.01);
Abstract

A semiconductor device includes a plasma-enhanced chemical vapor deposition (PECVD) protective layer configured to prevent failure of the semiconductor device throughout a temperature humidity with bias (THB) test exceeding about 1000 hours and/or a highly accelerated stress test (HAST) exceeding about 96 hours. Including a PECVD protective layer capable of protecting the semiconductor device throughout a THB test exceeding about 1000 hours and/or a HAST exceeding about 96 hours results in an extremely robust device, while providing the protective layer via PECVD results in convenience and cost savings.


Find Patent Forward Citations

Loading…