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The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Patent No.:

US 9755048 B1

PDFFull Text
Date of Patent:
Sep. 05, 2017

Filed:

May. 13, 2015

Patterned structure of a semiconductor device and a manufacturing method thereof

Applicant:

United Microelectronics Corp., Hsin-Chu, TW;

Inventors:

Rai-Min Huang, Taipei, TW;

I-Ming Tseng, Kaohsiung, TW;

Tong-Jyun Huang, Tainan, TW;

Kuan-Hsien Li, Tainan, TW;

Assignee:

UNITED MICROELECTRONICS CORP., Hsin-Chu, TW;

Attorney:

Winston Hsu

Primary Examiner:

Jesse Y Miyoshi

Assistant Examiner:

John Bodnar

Int. Cl.
CPC ...
H01L 29/66 (2006.01); H01L 29/06 (2006.01); H01L 21/311 (2006.01); H01L 29/40 (2006.01); H01L 27/088 (2006.01); H01L 21/8234 (2006.01); H01L 21/027 (2006.01); H01L 21/308 (2006.01);
U.S. Cl.
CPC ...
H01L 29/66545 (2013.01); H01L 21/3086 (2013.01); H01L 21/823437 (2013.01); H01L 27/088 (2013.01); H01L 29/0649 (2013.01); H01L 29/401 (2013.01); H01L 29/6656 (2013.01);
Abstract

A patterned structure of a semiconductor device includes a substrate, a first feature and a second feature. The first feature and the second feature are disposed on the substrate, and either of which includes a vertical segment and a horizontal segment. There is a distance between the vertical segment of the first feature and the vertical segment of the second feature, and the distance is less than the minimum exposure limits of an exposure apparatus.

Find Patent Forward Citations

Huang, Rai-Min. (2017). Patterned structure of a semiconductor device and a manufacturing method thereof (U.S. Patent No. 9755048). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/9755048

Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile

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