The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Sep. 05, 2017

Filed:

May. 05, 2014
Applicant:

Siltectra Gmbh, Dresden, DE;

Inventor:

Lukas Lichtensteiger, Zurich, CH;

Assignee:

Siltectra GmbH, Dresden, DE;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 21/00 (2006.01); H01L 21/683 (2006.01); H01L 21/304 (2006.01); H01L 21/02 (2006.01); B32B 15/08 (2006.01); B32B 27/28 (2006.01); B32B 37/18 (2006.01); B32B 38/10 (2006.01); B32B 43/00 (2006.01);
U.S. Cl.
CPC ...
H01L 21/6835 (2013.01); B32B 15/08 (2013.01); B32B 27/283 (2013.01); B32B 37/18 (2013.01); B32B 38/10 (2013.01); B32B 43/006 (2013.01); H01L 21/0201 (2013.01); H01L 21/02002 (2013.01); H01L 21/304 (2013.01); B32B 2311/00 (2013.01); B32B 2383/00 (2013.01); B32B 2457/14 (2013.01); H01L 2221/68345 (2013.01); H01L 2221/68381 (2013.01);
Abstract

The invention relates to a method for the production of layers of solid material, in particular for use as wafers, comprising the following steps: providing a workpiece for the separation of layers of solid material, the workpiece having at least one exposed surface, producing and/or providing a carrier unit for receiving at least one layer of solid material, the carrier unit being made in a number of layers, the carrier unit having a stabilisation layer and the stabilisation layer being overlapped at least partially by a receiving layer, the receiving layer being made to hold the layer of solid material, and the stabilisation layer being formed, at least partially, such that it has an E modulus that is greater than the E modulus of the receiving layer, connecting the receiving layer to the exposed surface of the workpiece, thus forming a composite structure, exposing the composite structure to an inner and/or outer stress field such that the layer of solid material is separated along a plane of the workpiece extending within the workpiece.


Find Patent Forward Citations

Loading…