The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 05, 2017
Filed:
Jul. 23, 2014
Applicant:
Applied Materials, Inc., Santa Clara, CA (US);
Inventors:
Brian T. West, San Jose, CA (US);
Roger M. Johnson, Livermore, CA (US);
Michael S. Cox, Gilroy, CA (US);
Assignee:
APPLIED MATERIALS, INC., Santa Clara, CA (US);
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01J 25/50 (2006.01); H01J 37/34 (2006.01); H01J 23/10 (2006.01); H03B 9/10 (2006.01); H03C 5/04 (2006.01); H03C 3/32 (2006.01); H01J 23/05 (2006.01); H01J 25/587 (2006.01);
U.S. Cl.
CPC ...
H01J 37/3405 (2013.01); H01J 23/10 (2013.01); H01J 37/345 (2013.01); H01J 23/05 (2013.01); H01J 25/50 (2013.01); H01J 25/587 (2013.01); H03B 9/10 (2013.01); H03C 3/32 (2013.01); H03C 5/04 (2013.01);
Abstract
Embodiments of the present invention generally provide a magnetron that is encapsulated by a material that is tolerant of heat and water. In one embodiment, the entire magnetron is encapsulated. In another embodiment, the magnetron includes magnetic pole pieces, and the magnetic pole pieces are not covered by the encapsulating material.