The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 05, 2017
Filed:
Dec. 11, 2015
Asml Netherlands B.v., Veldhoven, NL;
Jeroen Lodevicus Gerardus Janssen, Eindhoven, NL;
Johannes Jacobus Hubertus Paulides, Waalwijk, NL;
Elena Andreevna Lomonova, Eindhoven, NL;
Dave Theodorus Everardus Henricus Van Casteren, Eindhoven, NL;
Hans Butler, Best, NL;
ASML NETHERLANDS B.V., Veldhoven, NL;
Abstract
A vibration isolator is provided including a base structure, a load structure, a displacement structure and at least one vertical open gap formed by opposing and substantially parallel walls of the base structure and the load structure. The opposing walls being at least partly covered by respective arrays of permanent magnets, neighboring magnets in the arrays having alternating magnetization directions, an arrangement of the permanent magnets in the arrays being such that a gravitational force on the load structure is substantially compensated by a net magnetic force of the base structure on the load structure. The displacement structure relatively displaces arrays of permanent magnets of the opposing walls with respect to each along the gap for adjusting a load capacity of the vibration isolator.
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile