The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Sep. 05, 2017

Filed:

Aug. 28, 2015
Applicant:

Kla-tencor Corporation, Milpitas, CA (US);

Inventor:

J. Joseph Armstrong, Fremont, CA (US);

Assignee:

KLA-Tencor Corporation, Milpitas, CA (US);

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G02F 1/35 (2006.01); G02F 1/37 (2006.01); G02B 27/14 (2006.01); G02B 3/06 (2006.01); G02B 27/00 (2006.01); G02B 5/30 (2006.01); H01S 3/00 (2006.01); G01N 21/95 (2006.01); G01N 21/88 (2006.01);
U.S. Cl.
CPC ...
G02F 1/3532 (2013.01); G01N 21/8806 (2013.01); G01N 21/9501 (2013.01); G02B 3/06 (2013.01); G02B 5/3066 (2013.01); G02B 27/0025 (2013.01); G02B 27/141 (2013.01); G02F 1/37 (2013.01); H01S 3/0092 (2013.01); G01N 2201/068 (2013.01); G01N 2201/06113 (2013.01);
Abstract

The present invention includes a fundamental laser light source configured to generate fundamental wavelength laser light, a first nonlinear optical crystal configured to generate first alternate wavelength light, a second nonlinear optical crystal configured to generate second alternate wavelength light, a set of Brewster angle wavefront processing optics configured to condition the first and second alternate wavelengths of light, and a harmonic separator configured to receive the first alternate wavelength light and the second alternate wavelength light from the set of Brewster angle wavefront processing optics, the harmonic separator configured to at least partially separate the first alternate wavelength light from the second alternate wavelength light.


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