The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Aug. 29, 2017

Filed:

Aug. 14, 2015
Applicants:

Kee Sang Kwon, Seoul, KR;

Boun Yoon, Seoul, KR;

Sangjine Park, Yongin-si, KR;

Myunggeun Song, Yongin-si, KR;

Ki-hyung Ko, Yongin-si, KR;

Jiwon Yun, Hwaseong-si, KR;

Inventors:

Kee Sang Kwon, Seoul, KR;

Boun Yoon, Seoul, KR;

Sangjine Park, Yongin-si, KR;

Myunggeun Song, Yongin-si, KR;

Ki-Hyung Ko, Yongin-si, KR;

Jiwon Yun, Hwaseong-si, KR;

Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01L 29/78 (2006.01); H01L 27/088 (2006.01); H01L 29/66 (2006.01); H01L 21/8234 (2006.01); H01L 29/49 (2006.01); H01L 29/51 (2006.01);
U.S. Cl.
CPC ...
H01L 27/0886 (2013.01); H01L 21/82345 (2013.01); H01L 27/088 (2013.01); H01L 29/66545 (2013.01); H01L 29/785 (2013.01); H01L 29/7831 (2013.01); H01L 29/4966 (2013.01); H01L 29/513 (2013.01); H01L 29/517 (2013.01);
Abstract

Semiconductor devices may include a substrate, gate electrodes on the substrate, and source/drain regions at both sides of each of the gate electrodes. Each of the gate electrodes may include a gate insulating pattern on the substrate, a lower work-function electrode pattern that is on the gate insulating pattern and has a recessed upper surface, and an upper work-function electrode pattern that conformally extends on the recessed upper surface of the lower work-function electrode pattern. Topmost surfaces of the lower work-function electrode patterns may be disposed at an equal level, and the upper work-function electrode patterns may have different thicknesses from each other.


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