The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 29, 2017
Filed:
Jul. 01, 2013
Applicant:
Lam Research Ag, Villach, AT;
Inventors:
Assignee:
LAM RESEARCH AG, Villach, AT;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 21/673 (2006.01); H01L 21/687 (2006.01); F27B 5/14 (2006.01); F27D 5/00 (2006.01); F27D 11/02 (2006.01); H01L 21/67 (2006.01); F27B 17/00 (2006.01); F27D 99/00 (2010.01);
U.S. Cl.
CPC ...
H01L 21/67115 (2013.01); F27B 5/14 (2013.01); F27B 17/0025 (2013.01); F27D 5/0037 (2013.01); F27D 2099/0008 (2013.01);
Abstract
An apparatus for treating a disc-shaped article comprises a spin chuck and at least three individually controllable infrared heating elements. The infrared heating elements are mounted in a stationary manner with respect to rotation of said spin chuck. The infrared heating elements are arranged in a nested configuration so as to define individually controllable inner, middle and outer heating zones adjacent a disc-shaped article when positioned on the spin chuck.