The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 29, 2017
Filed:
Sep. 02, 2014
Kla-tencor Corporation, Milpitas, CA (US);
Ian Sierra Gabriel Kelly-Morgan, San Francisco, CA (US);
Vladimir N. Faifer, Santa Clara, CA (US);
James A. Real, Oakland, CA (US);
Biren Salunke, San Jose, CA (US);
Ralph Nyffenegger, Palo Alto, CA (US);
KLA-Tencor Corporation, Milpitas, CA (US);
Abstract
Methods and apparatus for providing measurements in p-n junctions and taking into account the lateral current for improved accuracy are disclosed. The lateral current may be controlled, allowing the spreading of the current to be reduced or substantially eliminated. Alternatively or additionally, the lateral current may be measured, allowing a more accurate normal current to be calculated by compensating for the measured spreading. In addition, the techniques utilized for controlling the lateral current and the techniques utilized for measuring the lateral current may also be implemented jointly.