The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Aug. 29, 2017

Filed:

Dec. 27, 2016
Applicant:

Rigaku Corporation, Akishima-shi, Tokyo, JP;

Inventors:

Takashi Yamada, Takatsuki, JP;

Yuichiro Shimizu, Takatsuki, JP;

Assignee:

Rigaku Corporation, Akishima-shi, Tokyo, JP;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G01N 15/02 (2006.01); G01N 23/223 (2006.01);
U.S. Cl.
CPC ...
G01N 23/223 (2013.01); G01N 15/0211 (2013.01); G01N 15/02 (2013.01); G01N 2223/076 (2013.01); G01N 2223/3037 (2013.01); G01N 2223/641 (2013.01);
Abstract

An X-ray fluorescence spectrometer includes: an X-ray source () to irradiate, with primary X-rays (), a sample () that is multiple nanoparticles placed on a substrate (); an irradiation angle adjustment unit () to adjust an irradiation angle at which a surface () of the substrate is irradiated; a detection unit () to measure an intensity of fluorescent X-rays () from the sample (); a peak position calculation unit () to generate a sample profile representing change of the intensity of the fluorescent X-rays () against change of the irradiation angle, and to calculate a peak irradiation angle position; a particle diameter calibration curve generation unit () to generate a calibration curve; and a particle diameter calculation unit () to calculate a particle diameter of nanoparticles of an unknown sample () by applying the peak irradiation angle position of the unknown sample () to the calibration curve.


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