The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 22, 2017
Filed:
Nov. 16, 2016
The Government of the United States of America, As Represented BY the Secretary of the Navy, Washington, DC (US);
Xiao Liu, Fairfax, VA (US);
Daniel R. Queen, Silver Spring, MD (US);
Frances Hellman, Berkeley, CA (US);
Thomas H. Metcalf, Washington, DC (US);
Matthew R. Abernathy, Washington, DC (US);
Glenn G. Jernigan, Waldorf, MD (US);
The United States of America as represented by the Secretary of the Navy, Washington, DC (US);
Abstract
A hydrogen-free amorphous dielectric insulating film having a high material density and a low density of tunneling states. The film is prepared by deposition of a dielectric material on a substrate having a high substrate temperature Tunder high vacuum and at a controlled low deposition rate. In one embodiment, the film is amorphous silicon while in another embodiment the film is amorphous germanium.