The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 22, 2017
Filed:
Feb. 04, 2014
Toei Scientific Industrial Co., Ltd., Sendai-shi, JP;
Tomokazu Yamashiro, Sendai, JP;
Hiroyuki Kenju, Sendai, JP;
Ryoichi Utsumi, Sendai, JP;
Shigeyuki Sato, Sendai, JP;
TOEI SCIENTIFIC INDUSTRIAL CO., LTD., Sendai-shi, Miyagi, JP;
Abstract
There is provided a prober chuck capable of carrying out low leakage evaluation on a magnetic memory under environment in which a magnetic field is applied. A prober chuckfor a magnetic memory retains a wafer W having a magnetic memory formed thereon. The chuckincludes: a chuck topthat is made of a conductive material and has a wafer W placed thereon; an insulating layerthat is made of an insulating material and is adapted to support the bottom surface of the chuck top; and a guard layerthat is made of a conductive material and is arranged under the insulating layer, the guard layer being insulated from the chuck topvia the insulating layer. All of the members constituting the chuckincluding the chuck topand the guard layerare made of a non-magnetic material.