The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 22, 2017
Filed:
Oct. 31, 2013
Applicant:
Toyo Tire & Rubber Co., Ltd., Osaka-shi, Osaka, JP;
Inventor:
Kenji Nakamura, Osaka, JP;
Assignee:
ROHM AND HAAS ELECTRONIC MATERIALS CMP HOLDINGS, INC., Newark, DE (US);
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
B24B 37/00 (2012.01); B24B 37/22 (2012.01); B24B 37/013 (2012.01); B24B 37/20 (2012.01); H01L 21/304 (2006.01);
U.S. Cl.
CPC ...
B24B 37/22 (2013.01); B24B 37/013 (2013.01); B24B 37/205 (2013.01); H01L 21/304 (2013.01);
Abstract
The purpose of the present invention is to provide a polishing pad that hardly generates scratches on a surface of a subject to be polished. This polishing pad is characterized in that: the polishing pad is provided with a polishing layer having a polishing region and a light-transmitting region; the light-transmitting region includes a surface layer positioned on the pad surface side, and at least one soft layer laminated under the surface layer, and the soft layer has a hardness lower than that of the surface layer.