The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Aug. 15, 2017

Filed:

Sep. 22, 2016
Applicant:

International Business Machines Corporation, Armonk, NY (US);

Inventors:

Albert M. Chu, Nashua, NH (US);

Lawrence A. Clevenger, Lagrangeville, NY (US);

Ximeng Guan, Fremont, CA (US);

Myung-Hee Na, Lagrangeville, NY (US);

Attorneys:
Primary Examiner:
Int. Cl.
CPC ...
G06F 17/50 (2006.01); H01L 21/311 (2006.01); H01L 27/02 (2006.01); H01L 21/033 (2006.01); H01L 21/768 (2006.01); H01L 23/522 (2006.01);
U.S. Cl.
CPC ...
H01L 21/31144 (2013.01); G06F 17/5081 (2013.01); H01L 21/0337 (2013.01); H01L 21/76816 (2013.01); H01L 21/76879 (2013.01); H01L 21/76897 (2013.01); H01L 23/5226 (2013.01); H01L 27/0207 (2013.01);
Abstract

A technique relates to a method of optimizing self-aligned double patterning. Predefined locations for required metal cuts are provided in order to form metal wires from metal fills that have been cut. Extended locations for extended metal cuts are provided in order to cut adjacent metal fills. The adjacent metal fills are the metal fills that are adjacent to the predefined locations for the required metal cuts, and the extended metal cuts extend beyond the required metal cuts. The required metal cuts into the metal fills are performed and the extended metal cuts into the adjacent metal fills are performed.


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