The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 15, 2017
Filed:
Dec. 24, 2014
Hamamatsu Photonics K.k., Hamamatsu-shi, Shizuoka, JP;
Kazuhiro Hotta, Hamamatsu, JP;
HAMAMATSU PHOTONICS K.K., Hamamatsu-shi, Shizuoka, JP;
Abstract
An image processing method includes a step of acquiring a measured image Gmeasured from a semiconductor device S and a first pattern image Gshowing a pattern of the semiconductor device S, a step of acquiring a reference measured image Gmeasured from a reference semiconductor device SR being the semiconductor device S or a semiconductor device different from the semiconductor device S and a second pattern image Gshowing a pattern of the reference semiconductor device SR, a step of acquiring matching information indicating a correlation of the first pattern image Gand the second pattern image G, and a step of determining a difference of the measured image Gand the reference measured image Gbased on the matching information to acquire a comparative image G.