The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 08, 2017
Filed:
Apr. 05, 2016
Applicant:
Shin-etsu Chemical Co., Ltd., Tokyo, JP;
Inventors:
Daisuke Kori, Jyoetsu, JP;
Kazumi Noda, Jyoetsu, JP;
Kazunori Maeda, Jyoetsu, JP;
Rie Kikuchi, Jyoetsu, JP;
Tsutomu Ogihara, Jyoetsu, JP;
Assignee:
SHIN-ETSU CHEMICAL CO., LTD., Tokyo, JP;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 21/31 (2006.01); C07C 219/32 (2006.01); G03F 7/11 (2006.01); C07C 69/94 (2006.01); C07C 317/22 (2006.01); C07C 69/84 (2006.01); H01L 21/32 (2006.01); H01L 21/324 (2006.01); H01L 21/3105 (2006.01); H01L 21/311 (2006.01); C07C 69/33 (2006.01); C07C 69/76 (2006.01); C07C 219/14 (2006.01); G03F 7/09 (2006.01);
U.S. Cl.
CPC ...
H01L 21/31 (2013.01); C07C 69/33 (2013.01); C07C 69/76 (2013.01); C07C 69/84 (2013.01); C07C 69/94 (2013.01); C07C 219/14 (2013.01); C07C 317/22 (2013.01); G03F 7/091 (2013.01); G03F 7/094 (2013.01); H01L 21/31056 (2013.01); H01L 21/31058 (2013.01); H01L 21/31138 (2013.01); H01L 21/31144 (2013.01); H01L 21/32 (2013.01); H01L 21/324 (2013.01); C07C 2103/18 (2013.01); C07C 2103/24 (2013.01);
Abstract
An organic film composition including a compound represented by the following general formula (1), There can be provided an organic film composition for forming an organic film having dry etching resistance as well as advanced filling/planarizing characteristics.